High-resolution analytical SEM for routine materials characterization
TESCAN MIRA’s 4th generation is specialized for High-resolution analytical SEM for routine materials characterization, research and quality control applications at the sub-micron scale. With FEG Schottky electron emission source MIRA combines SEM imaging and live elemental composition analysis in a single window of TESCAN’s Essence™ software. Optimum imaging and analytical conditions are immediately available thanks to the unique apertureless design due to the Wide Field Optics™ design. Ultimate safety of the chamber mounted detectors when the stage and sample are in motion is guaranteed with Essence™ 3D Collision model.