The technique is fast and requires no sample preparation. It is also precise, reproducible, very sensitive to thin films below 10 nm, and it covers a wide spectral range usually from 190-2100 nm. Spectroscopic ellipsometry is applicable to almost any thin film material and it is ideal for in-situ applications.
Materials suitable for spectroscopic ellipsometry include semiconductors, dielectrics, polymers, organics, and metals. Ellipsometry can also be used to study solid-liquid or liquidliquid interfaces.
Depending on the type of material, ellipsometry can measure thickness from a few A to tens of microns. How far into the material the light can travel depends on the material’s absorption coefficient.

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