Precise, reproducible, very sensitive to thin films below 10 nm
The technique is fast and requires no sample preparation. It is also precise, reproducible, very sensitive to thin films below 10 nm, and it covers a wide spectral range usually from 190-2100 nm. Spectroscopic ellipsometry is applicable to almost any thin film material and it is ideal for in-situ applications.
Materials suitable for spectroscopic ellipsometry include semiconductors, dielectrics, polymers, organics, and metals. Ellipsometry can also be used to study solid-liquid or liquidliquid interfaces.
Depending on the type of material, ellipsometry can measure thickness from a few A to tens of microns. How far into the material the light can travel depends on the material’s absorption coefficient.