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Vacuum UV Spectroscopy


Vacuum Ultra Violet (VUV) regions

Horiba Vacuum UV Spectroscopy

The Vacuum Ultra Violet (VUV) regions are surrounded by “above” the ultraviolet (UV) spectral region (from 200 nm) and the long wavelength side of the Hard X-Ray region below (around 1 nm).
Three main regions make up the Vacuum Ultra Violet domain:
- The Far Ultra Violet (FUV): 200-120 nm corresponds to the natural barrier of the transmittance of radiation through any window material
- The Extreme Ultra Violet (EUV): 120-10 nm
- The Soft X-Rays (Soft X): 15-0.2 nm that requires the use of large deviation angles up to 170°


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